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Steven M. George Research Group
College of Arts and Sciences
Steven M. George Research Group
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Equipment & Techniques
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Home
Introduction
Equipment & Techniques
Projects
Publications
Group Members
Photo Gallery
Recruiting, Collaborations & Funding
News
Projects
Projects
听
The Links Below Highlight Some of听the Current Research Projects听in the Group.听听
听
Atomic Layer Etching (ALE)
Electron-Enhanced ALD
Spatial ALD and Roll-to-Roll ALD
Molecular Layer Deposition (MLD) of Organic & Hybrid Organic-Inorganic Films
Electrochemical Applications of ALD
ALD & ALE for Micro Electro Mechanical Systems (MEMS)
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